High-Entropy Oxide Semiconductor-Based MEMS Sensor Array: Trace Formaldehyde Recognition in Mixed Gases

	作者:	Yu Bing, Hongtao Jiang, Wang Li, Zhao Song, Tingting Zhou, Tong Zhang
	期刊:	IEEE Electr. Device. L.
	卷号:	Accepted
	接收日期:	2025-12-31 09:04:20
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