MEMS gas sensor based on ZnCu-based oxide senmiconductors for H2S detection

	作者:	Zhao Song, Yu Bing, Shuang Cao, Hongtao Jiang, Xiaoyi Xu, Tingting Zhou, Tong Zhang
	期刊:	IEEE Electr. Device. L.
	卷号:	Accepted
	接收日期:	2025-08-01 14:15:12
	期刊链接